Details

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Machine Structure with Stainless Steel Panels.
The machine structure typically includes a heavy-duty frame to ensure stability and minimize vibration, which is essential for maintaining flatness tolerance during operation.
Key surfaces of the machine are machined to achieve high flatness tolerances (often within microns). This ensures that components like wafers are handled and processed accurately.
Stainless steel panels can be welded to create a seamless structure, reducing the risk of contamination from joints or fasteners.

Weight: 3.5tons
Width: 2050mm
Height: 2400mm
Length: 2800mm